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TOKYO ELECTRON LIMITED BBC-15 CONTROLLER UNIT
TOKYO ELECTRON LIMITED BBC-15 CONTROLLER UNIT

$499.99

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NEW Sealed Tokyo Electron Limited TEL HTE-IH2-B-11 TCB1220 Board, IF HP
NEW Sealed Tokyo Electron Limited TEL HTE-IH2-B-11 TCB1220 Board, IF HP

$83.19

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TEL/Tokyo Electron Limited 1B81-010284-13 Pulse Cut I/F Circuit Board/Card
TEL/Tokyo Electron Limited 1B81-010284-13 Pulse Cut I/F Circuit Board/Card

$59.99

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TEL/Tokyo Electron Limited P064 Board 1B81-010267-13 Controller PCB Card
TEL/Tokyo Electron Limited P064 Board 1B81-010267-13 Controller PCB Card

$125.99

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TOKYO ELECTRON LIMITED GAS I/F BRD-D 1A80-004119-11 GAS-D , 1A08-010762-11
TOKYO ELECTRON LIMITED GAS I/F BRD-D 1A80-004119-11 GAS-D , 1A08-010762-11

$1128.24

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TOKYO ELECTRON LIMITED MC-31041A PCB ASSEMBLY
TOKYO ELECTRON LIMITED MC-31041A PCB ASSEMBLY

$49.99

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TOKYO ELECTRON LIMITED KIT 24-0787-00
TOKYO ELECTRON LIMITED KIT 24-0787-00

$20.70

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TOKYO ELECTRON LIMITED TRIAS LIFT ASSEMBLY 3787-012436
TOKYO ELECTRON LIMITED TRIAS LIFT ASSEMBLY 3787-012436

$800.00

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TOKYO ELECTRON LIMITED 3B84-000529-11 FORK, ASSY CARRIER
TOKYO ELECTRON LIMITED 3B84-000529-11 FORK, ASSY CARRIER

$2999.99

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TOKYO ELECTRON LIMITED ES2L05-350412-V1, PLATE, QUARTS NS4
TOKYO ELECTRON LIMITED ES2L05-350412-V1, PLATE, QUARTS NS4

$99.99

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TEL Tokyo Electron Limited 3Z05-300106-11 Disk (W0.2) Delay Wave *new surplus
TEL Tokyo Electron Limited 3Z05-300106-11 Disk (W0.2) Delay Wave *new surplus

$500.00

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TOKYO ELECTRON LIMITED tVME-UIO/BS 381-642277-3
TOKYO ELECTRON LIMITED tVME-UIO/BS 381-642277-3

$1450.00

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Tokyo Electron Limited Ground Block, 2 3/8 X 4 3/4,18 Slots,Plated Copper, Used
Tokyo Electron Limited Ground Block, 2 3/8 X 4 3/4,18 Slots,Plated Copper, Used

$100.00

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TEL Tokyo Electron Limited CP8000-1MB PCB Assembly, Used
TEL Tokyo Electron Limited CP8000-1MB PCB Assembly, Used

$375.00

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Tokyo Electron Limited, 8s, SW, Photosensor, Emitter Harness (Drive Mechanism)
Tokyo Electron Limited, 8s, SW, Photosensor, Emitter Harness (Drive Mechanism)

$200.00

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TEL Tokyo Electron Limited CP8321A PCB Assembly, Used
TEL Tokyo Electron Limited CP8321A PCB Assembly, Used

$375.00

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TEL Tokyo Electron Limited 3D10-350401-11 Focus Ring 302-303TP T8 6 LV *new
TEL Tokyo Electron Limited 3D10-350401-11 Focus Ring 302-303TP T8 6 LV *new

$500.00

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TEL Tokyo Electron Limited 42090530-001 CT1381-652466-17 GEN2 Pump I/F Board
TEL Tokyo Electron Limited 42090530-001 CT1381-652466-17 GEN2 Pump I/F Board

$500.00

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TEL Tokyo Electron Limited 3D10-150718-11 Plate Cooling *new surplus
TEL Tokyo Electron Limited 3D10-150718-11 Plate Cooling *new surplus

$1000.00

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TEL TOKYO ELECTRON LIMITED 3M87-019969 CM Controller
TEL TOKYO ELECTRON LIMITED 3M87-019969 CM Controller

$886.00

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TEL Tokyo Electron Limited 3Z10-100347-11 Cooling Disk (12) ANT *new surplus
TEL Tokyo Electron Limited 3Z10-100347-11 Cooling Disk (12) ANT *new surplus

$750.00

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TEL Tokyo Electron Limited 3Z05-200171-V1 Ring Focus MS 4Z-3 0 *new surplus
TEL Tokyo Electron Limited 3Z05-200171-V1 Ring Focus MS 4Z-3 0 *new surplus

$500.00

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Tokyo Electron Limited TEL TEB211-12 GRSO EC80-000180-12 free ship
Tokyo Electron Limited TEL TEB211-12 GRSO EC80-000180-12 free ship

$135.00

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TEL Tokyo Electron Limited ES3D10-100845-V1 Plate Exhaust Y-AL SE *new surplus
TEL Tokyo Electron Limited ES3D10-100845-V1 Plate Exhaust Y-AL SE *new surplus

$750.00

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TEL Tokyo Electron Limited 3D10-251155-V1 Ring Focus 360-302-C *new surplus
TEL Tokyo Electron Limited 3D10-251155-V1 Ring Focus 360-302-C *new surplus

$500.00

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TEL Tokyo Electron Limited 3Z10-100347-11 Cooling Disk (12) ANT *new surplus
TEL Tokyo Electron Limited 3Z10-100347-11 Cooling Disk (12) ANT *new surplus

$750.00

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TEL TOKYO ELECTRON LIMITED SW300B/RF 3M80-002502-13 +SW300B/ AI02
TEL TOKYO ELECTRON LIMITED SW300B/RF 3M80-002502-13 +SW300B/ AI02

$289.90

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Tokyo Electron Limited TEL Quartz Lifter Pin Set of 6 3M10-451019-11
Tokyo Electron Limited TEL Quartz Lifter Pin Set of 6 3M10-451019-11

$99.99

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TEL Tokyo Electron Limited, Model M-340 CX, Gas System Ctrl Unit, Used
TEL Tokyo Electron Limited, Model M-340 CX, Gas System Ctrl Unit, Used

$2000.00

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PCB, MC-31023, TEL Tokyo Electron Limited
PCB, MC-31023, TEL Tokyo Electron Limited

$225.00

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Tokyo Electron Limited PCB Systems I/O Board 80-PCB-92-93 NEW
Tokyo Electron Limited PCB Systems I/O Board 80-PCB-92-93 NEW

$199.99

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Tokyo Electron Limited, Alpha 8s, Omron SSG-01L2H Micro Switch, 0.1A, 30V, Used
Tokyo Electron Limited, Alpha 8s, Omron SSG-01L2H Micro Switch, 0.1A, 30V, Used

$295.00

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TEL Tokyo Electron Limited 3Z05-200095-11 Dielectric Plate FGD-T40P-12S *new
TEL Tokyo Electron Limited 3Z05-200095-11 Dielectric Plate FGD-T40P-12S *new

$750.00

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TEL Tokyo Electron Limited 3Z05-200174-V1 Ring Focus MS 4Z-2 5 *new surplus
TEL Tokyo Electron Limited 3Z05-200174-V1 Ring Focus MS 4Z-2 5 *new surplus

$500.00

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TOKYO ELECTRON ECC2 CONTROLLER LIMITED 659010A
TOKYO ELECTRON ECC2 CONTROLLER LIMITED 659010A

$600.95

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TEL Tokyo Electron Limited ES2010-251591-11 Focus Ring PM380-303 T8 VA *new
TEL Tokyo Electron Limited ES2010-251591-11 Focus Ring PM380-303 T8 VA *new

$500.00

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TEL Tokyo Electron Limited 3D05-250240-V1 Ring Upper Shield SQ-GRV *new surplus
TEL Tokyo Electron Limited 3D05-250240-V1 Ring Upper Shield SQ-GRV *new surplus

$750.00

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TEL Tokyo Electron Limited ES2L05-350306-V1 Ring QZ-GND 5. 0-T16. 5 VIX-MP *new
TEL Tokyo Electron Limited ES2L05-350306-V1 Ring QZ-GND 5. 0-T16. 5 VIX-MP *new

$500.00

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TOKYO ELECTRON LIMITED TEL PCB ASSEMBLY 2L81-050156-V1 TYB62U-2/VCIL-LF
TOKYO ELECTRON LIMITED TEL PCB ASSEMBLY 2L81-050156-V1 TYB62U-2/VCIL-LF

$350.00

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TOKYO ELECTRON LIMITED PCB 2L81-050096-22 TAB22P-2/GAS3-R
TOKYO ELECTRON LIMITED PCB 2L81-050096-22 TAB22P-2/GAS3-R

$400.00

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TEL Tokyo Electron Limited 3Z10-200703-11 Plate Slot Antenna *new surplus
TEL Tokyo Electron Limited 3Z10-200703-11 Plate Slot Antenna *new surplus

$500.00

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TEL TOKYO ELECTRON LIMITED TGB811-1/TM SENS CTRL Board BX81-070100-12 (As-Is)
TEL TOKYO ELECTRON LIMITED TGB811-1/TM SENS CTRL Board BX81-070100-12 (As-Is)

$533.33

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TEL TOKYO ELECTRON LIMITED SW300B/RF 3M81-025137-21 +SW300B/ AI02
TEL TOKYO ELECTRON LIMITED SW300B/RF 3M81-025137-21 +SW300B/ AI02

$289.90

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TEL Tokyo Electron Limited 3Z05-200172-V1 Ring Focus MS 4Z-1. 5 *new surplus
TEL Tokyo Electron Limited 3Z05-200172-V1 Ring Focus MS 4Z-1. 5 *new surplus

$500.00

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TEL Tokyo Electron Limited 3Z05-200173-V1 Ring Focus MS 4Z-2. 0 *new surplus
TEL Tokyo Electron Limited 3Z05-200173-V1 Ring Focus MS 4Z-2. 0 *new surplus

$500.00

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TEL Tokyo Electron Limited Wafer Heating Furnace Machine Used
TEL Tokyo Electron Limited Wafer Heating Furnace Machine Used

$31800.00

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TEL Tokyo Electron Limited, Model 340 Gas System Ctrl Unit, Used
TEL Tokyo Electron Limited, Model 340 Gas System Ctrl Unit, Used

$2500.00

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TEL Tokyo Electron Limited 3Z05-200058-11 Dielectric Plate *new surplus
TEL Tokyo Electron Limited 3Z05-200058-11 Dielectric Plate *new surplus

$1375.00

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TEL Tokyo Electron Limited 3D10-150450-V1 Ring BTM Shield EXHP-UP *new surplus
TEL Tokyo Electron Limited 3D10-150450-V1 Ring BTM Shield EXHP-UP *new surplus

$500.00

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NEW Tokyo Electron Limited (TEL) 3M10-311497-11 Assembly Base Plate Dammy HTR
NEW Tokyo Electron Limited (TEL) 3M10-311497-11 Assembly Base Plate Dammy HTR

$159.99

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TEL Tokyo Electron Limited 2L05-350526-V1 Spacer Gap T5 (QZ40) DS-1 *new
TEL Tokyo Electron Limited 2L05-350526-V1 Spacer Gap T5 (QZ40) DS-1 *new

$500.00

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TOKYO ELECTRON LIMITED P-12XL AQA-K09-TYP2 CHILLER
TOKYO ELECTRON LIMITED P-12XL AQA-K09-TYP2 CHILLER

$3299.99

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TEL Tokyo Electron Limited RE3Z05-200058-11 Dielectric Plate D-T40P-12S/L8 *new
TEL Tokyo Electron Limited RE3Z05-200058-11 Dielectric Plate D-T40P-12S/L8 *new

$750.00

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TEL Tokyo Electron Limited 3D05-350127-V1 Ring Protection RF-Split *new surplus
TEL Tokyo Electron Limited 3D05-350127-V1 Ring Protection RF-Split *new surplus

$500.00

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TEL Tokyo Electron Limited 3D05-150033-V1 Cover Electrode 328 AL *new surplus
TEL Tokyo Electron Limited 3D05-150033-V1 Cover Electrode 328 AL *new surplus

$625.00

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TEL TOKYO ELECTRON LIMITED 127MM RING 5 1/4'' DIAMETER
TEL TOKYO ELECTRON LIMITED 127MM RING 5 1/4'' DIAMETER

$199.99

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TEL TOKYO ELECTRON LIMITED PF-DB-DPIF Board BX81-070082-12 (As-Is)
TEL TOKYO ELECTRON LIMITED PF-DB-DPIF Board BX81-070082-12 (As-Is)

$355.56

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TOKYO ELECTRON LIMITED TW87-004413-12 FIX DS EPU Lifter Assy "Unused"
TOKYO ELECTRON LIMITED TW87-004413-12 FIX DS EPU Lifter Assy "Unused"

$249.00

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TEL Tokyo Electron Limited 2L10-151458-V1 Plate EXH FC2 VQD (ES) *new surplus
TEL Tokyo Electron Limited 2L10-151458-V1 Plate EXH FC2 VQD (ES) *new surplus

$750.00

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Tokyo Electron Limited 3M81-024287-12 Precision DC Amplifier Board Used
Tokyo Electron Limited 3M81-024287-12 Precision DC Amplifier Board Used

$195.00

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TOKYO ELECTRON LIMITED TEL 3M87-069369-31 STAGE HEATER ASSY
TOKYO ELECTRON LIMITED TEL 3M87-069369-31 STAGE HEATER ASSY

$8888.00

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TEL TOKYO ELECTRON LIMITED SW300B/HCF Board 3M81-029643-12 (As-Is)
TEL TOKYO ELECTRON LIMITED SW300B/HCF Board 3M81-029643-12 (As-Is)

$355.56

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TEL Tokyo Electron Limited 500177943-RF Anneal Dielectric Plate RSL A *new
TEL Tokyo Electron Limited 500177943-RF Anneal Dielectric Plate RSL A *new

$1375.00

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TEL Tokyo Electron Limited, Model 340CX, M340-CVD Gas System Ctrl Unit, Used
TEL Tokyo Electron Limited, Model 340CX, M340-CVD Gas System Ctrl Unit, Used

$3000.00

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Tokyo Electron Limited TEL Emergency Shut Off w/ One Monitor
Tokyo Electron Limited TEL Emergency Shut Off w/ One Monitor

$950.00

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Tokyo Electron Limited TEL TEB211-15 GRSO EC80-000180-15 free ship
Tokyo Electron Limited TEL TEB211-15 GRSO EC80-000180-15 free ship

$135.00

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TEL Tokyo Electron Limited, Model 340, Gas System Ctrl Unit, Used
TEL Tokyo Electron Limited, Model 340, Gas System Ctrl Unit, Used

$2500.00

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TEL Tokyo Electron Limited 2L10-254855-V1 Ring Cel Holder (Q-ALE) V2E *new
TEL Tokyo Electron Limited 2L10-254855-V1 Ring Cel Holder (Q-ALE) V2E *new

$750.00

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TEL Tokyo Electron Limited EFEM LM-SFE1
TEL Tokyo Electron Limited EFEM LM-SFE1

$46300.00

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TEL TOKYO ELECTRON LIMITED GAS PRESS MON Board 3M81-036411-12 (As-Is)
TEL TOKYO ELECTRON LIMITED GAS PRESS MON Board 3M81-036411-12 (As-Is)

$266.67

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TEL Tokyo Electron Limited ROM / EPROM for M3100, MBM27C512-20, Lot of 3, New
TEL Tokyo Electron Limited ROM / EPROM for M3100, MBM27C512-20, Lot of 3, New

$75.00

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NEW Tokyo Electron Limited (TEL) 3M87-065514-11 Assembly FDCBOX1 for PF Pump
NEW Tokyo Electron Limited (TEL) 3M87-065514-11 Assembly FDCBOX1 for PF Pump

$139.99

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Tokyo Electron Limited Power Supply DC SR110-12, 039-110914-1, 122459
Tokyo Electron Limited Power Supply DC SR110-12, 039-110914-1, 122459

$750.00

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TEL TOKYO ELECTRON LIMITED GHOST-CUBIC Board 3M80-001239-11 (As-Is)
TEL TOKYO ELECTRON LIMITED GHOST-CUBIC Board 3M80-001239-11 (As-Is)

$445.00

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TEL Tokyo Electron Limited RE3Z10-100454-V1 Electrode Bottom 4Z-ST *used working
TEL Tokyo Electron Limited RE3Z10-100454-V1 Electrode Bottom 4Z-ST *used working

$1000.00

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TEL Tokyo Electron Limited 3D05-350173-V1 Covering Ring FBI LV *new surplus
TEL Tokyo Electron Limited 3D05-350173-V1 Covering Ring FBI LV *new surplus

$750.00

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TEL Tokyo Electron Limited Vacuum Chamber part 5Z004NQ14513
TEL Tokyo Electron Limited Vacuum Chamber part 5Z004NQ14513

$249.99

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TOKYO ELECTRON LIMITED 5049-022 TEL A-8 MT-I/L 2181-020026-12
TOKYO ELECTRON LIMITED 5049-022 TEL A-8 MT-I/L 2181-020026-12

$399.99

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TEL Tokyo Electron Limited, Model 340 CVD-X / 340CX Gas System Ctrl Unit, Used
TEL Tokyo Electron Limited, Model 340 CVD-X / 340CX Gas System Ctrl Unit, Used

$3000.00

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Tokyo Electron Limited TEL Emergency Shut Off and Exhaust Monitor
Tokyo Electron Limited TEL Emergency Shut Off and Exhaust Monitor

$950.00

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[Used] TEL TOKYO ELECTRON LIMITED TVB 1203 -I /EEC 381-648286-12 FREE SHIPPING
[Used] TEL TOKYO ELECTRON LIMITED TVB 1203 -I /EEC 381-648286-12 FREE SHIPPING

$1200.00

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Tokyo Electron Limited, Manostar FR51 Exhaust Monitor, Range 0 - 0.3, Used
Tokyo Electron Limited, Manostar FR51 Exhaust Monitor, Range 0 - 0.3, Used

$200.00

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TOKYO ELECTRON LIMITED RF CONTROL 885-97-000
TOKYO ELECTRON LIMITED RF CONTROL 885-97-000

$1500.00

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TOKYO ELECTRON LIMITED 5010-605611-11 RING,ESC HOLD (2-2)
TOKYO ELECTRON LIMITED 5010-605611-11 RING,ESC HOLD (2-2)

$149.99

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Tokyo Electron Limited 3285-003229-13 Z/THETA UNIT , THK LMT64SGL-71767825 NEW
Tokyo Electron Limited 3285-003229-13 Z/THETA UNIT , THK LMT64SGL-71767825 NEW

$4888.00

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NEW TEL TOKYO ELECTRON LIMITED Oriental Motor CSD5807N-P-A11 FREE SHIPPING
NEW TEL TOKYO ELECTRON LIMITED Oriental Motor CSD5807N-P-A11 FREE SHIPPING

$350.00

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381-600090-1 / 6" LIMIT SENSOR PCA / TOKYO ELECTRON TEL
381-600090-1 / 6" LIMIT SENSOR PCA / TOKYO ELECTRON TEL

$150.99

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TEL TOKYO ELECTRON LIMITED 3M05-200051-11
TEL TOKYO ELECTRON LIMITED 3M05-200051-11

$349.99

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TEL TOKYO ELECTRON LIMITED 5010-605610-11 RING,ESC HOLD (2-1)
TEL TOKYO ELECTRON LIMITED 5010-605610-11 RING,ESC HOLD (2-1)

$149.99

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✅ 1PCS TEL TOKYO ELECTRON LIMITED 11-14259-01 REV F
✅ 1PCS TEL TOKYO ELECTRON LIMITED 11-14259-01 REV F

$99.00

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Tokyo Electron Limited TEL Emergency Shut Off and Control Panel, FNC/Heater
Tokyo Electron Limited TEL Emergency Shut Off and Control Panel, FNC/Heater

$500.00

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Tokyo Electron Limited TEL Emergency Shut Off and Control Panel, F-Door/Cassette
Tokyo Electron Limited TEL Emergency Shut Off and Control Panel, F-Door/Cassette

$500.00

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Tokyo Electron Limited TEL Emergency Shut Off w/ Dwyer Water Meter
Tokyo Electron Limited TEL Emergency Shut Off w/ Dwyer Water Meter

$150.00

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Tokyo Electron Limited Ground Block 2 X 3 1/8, 11 Slots, Plated Copper, Used
Tokyo Electron Limited Ground Block 2 X 3 1/8, 11 Slots, Plated Copper, Used

$25.00

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Tokyo Electron Limited Water Cooling Unit, W/C Unit, S/N A01109785114, Used
Tokyo Electron Limited Water Cooling Unit, W/C Unit, S/N A01109785114, Used

$2900.00

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NEW Sealed Tokyo Electron TEL Q320-061229 0YDK-144 5 Channel THC Analog Board
NEW Sealed Tokyo Electron TEL Q320-061229 0YDK-144 5 Channel THC Analog Board

$83.19

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[Used] TEL TOKYO ELECTRON Limited BOARD 8749 I/O board 3 FREE SHIPPING
[Used] TEL TOKYO ELECTRON Limited BOARD 8749 I/O board 3 FREE SHIPPING

$180.00

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Tokyo Electron TEL 3D08-000019-12 TYB513-1/IOGS C.V02 PCB Board Card Module
Tokyo Electron TEL 3D08-000019-12 TYB513-1/IOGS C.V02 PCB Board Card Module

$78.49

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Tokyo Electron Limited, MC-31184 PCB Assembly for TS-4000Z Control Panel
Tokyo Electron Limited, MC-31184 PCB Assembly for TS-4000Z Control Panel

$195.00

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Tokyo Electron Limited Ground Block, 36 Slots, Plated Copper, Used
Tokyo Electron Limited Ground Block, 36 Slots, Plated Copper, Used

$120.00

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