Description: Advances in Rapid Thermal and Integrated Processing by F. Roozeboom Estimated delivery 3-12 business days Format Hardcover Condition Brand New Description Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage. Publisher Description Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks and new areas of potential application, such as the processing of III-V semiconductor structures and thin-film head processing for high-density magnetic data storage. Details ISBN 0792340116 ISBN-13 9780792340119 Title Advances in Rapid Thermal and Integrated Processing Author F. Roozeboom Format Hardcover Year 1996 Pages 566 Edition 1996th Publisher Springer GE_Item_ID:140353414; About Us Grand Eagle Retail is the ideal place for all your shopping needs! With fast shipping, low prices, friendly service and over 1,000,000 in stock items - you're bound to find what you want, at a price you'll love! Shipping & Delivery Times Shipping is FREE to any address in USA. Please view eBay estimated delivery times at the top of the listing. Deliveries are made by either USPS or Courier. We are unable to deliver faster than stated. International deliveries will take 1-6 weeks. NOTE: We are unable to offer combined shipping for multiple items purchased. This is because our items are shipped from different locations. Returns If you wish to return an item, please consult our Returns Policy as below: Please contact Customer Services and request "Return Authorisation" before you send your item back to us. Unauthorised returns will not be accepted. Returns must be postmarked within 4 business days of authorisation and must be in resellable condition. Returns are shipped at the customer's risk. We cannot take responsibility for items which are lost or damaged in transit. For purchases where a shipping charge was paid, there will be no refund of the original shipping charge. Additional Questions If you have any questions please feel free to Contact Us. Categories Baby Books Electronics Fashion Games Health & Beauty Home, Garden & Pets Movies Music Sports & Outdoors Toys
Price: 483.58 USD
Location: Fairfield, Ohio
End Time: 2024-05-19T02:10:17.000Z
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Restocking Fee: No
Return shipping will be paid by: Buyer
All returns accepted: Returns Accepted
Item must be returned within: 30 Days
Refund will be given as: Money Back
ISBN-13: 9780792340119
Book Title: Advances in Rapid Thermal and Integrated Processing
Item Length: 9.3in
Item Width: 6.1in
Author: Fred Roozeboom
Publication Name: Advances in Rapid Thermal and Integrated Processing : Proceedings of the NATO Advanced Study Institute Acquafredda di Maratea, Italy, July 3-4, l995
Format: Hardcover
Language: English
Publisher: Springer Netherlands
Publication Year: 1996
Series: NATO Science Series E: Ser.
Type: Textbook
Item Weight: 76.9 Oz
Number of Pages: Xii, 566 Pages
